JPH0447955Y2 - - Google Patents

Info

Publication number
JPH0447955Y2
JPH0447955Y2 JP1984008136U JP813684U JPH0447955Y2 JP H0447955 Y2 JPH0447955 Y2 JP H0447955Y2 JP 1984008136 U JP1984008136 U JP 1984008136U JP 813684 U JP813684 U JP 813684U JP H0447955 Y2 JPH0447955 Y2 JP H0447955Y2
Authority
JP
Japan
Prior art keywords
tube
wall protection
semiconductor substrate
chemical vapor
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984008136U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60119743U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP813684U priority Critical patent/JPS60119743U/ja
Publication of JPS60119743U publication Critical patent/JPS60119743U/ja
Application granted granted Critical
Publication of JPH0447955Y2 publication Critical patent/JPH0447955Y2/ja
Granted legal-status Critical Current

Links

JP813684U 1984-01-23 1984-01-23 化学的気相付着装置 Granted JPS60119743U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP813684U JPS60119743U (ja) 1984-01-23 1984-01-23 化学的気相付着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP813684U JPS60119743U (ja) 1984-01-23 1984-01-23 化学的気相付着装置

Publications (2)

Publication Number Publication Date
JPS60119743U JPS60119743U (ja) 1985-08-13
JPH0447955Y2 true JPH0447955Y2 (en]) 1992-11-12

Family

ID=30487142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP813684U Granted JPS60119743U (ja) 1984-01-23 1984-01-23 化学的気相付着装置

Country Status (1)

Country Link
JP (1) JPS60119743U (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0543471Y2 (en]) * 1988-10-18 1993-11-02
JPH0715133Y2 (ja) * 1989-04-21 1995-04-10 沖電気工業株式会社 半導体薄膜形成装置の反応管

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5130477A (ja) * 1974-09-09 1976-03-15 Kokusai Electric Co Ltd Kisoseichosochi

Also Published As

Publication number Publication date
JPS60119743U (ja) 1985-08-13

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